JPH0452356U - - Google Patents
Info
- Publication number
- JPH0452356U JPH0452356U JP9526590U JP9526590U JPH0452356U JP H0452356 U JPH0452356 U JP H0452356U JP 9526590 U JP9526590 U JP 9526590U JP 9526590 U JP9526590 U JP 9526590U JP H0452356 U JPH0452356 U JP H0452356U
- Authority
- JP
- Japan
- Prior art keywords
- plasma chamber
- plasma
- group
- discharge
- electron emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 2
- 239000000284 extract Substances 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9526590U JPH0452356U (en]) | 1990-09-10 | 1990-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9526590U JPH0452356U (en]) | 1990-09-10 | 1990-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0452356U true JPH0452356U (en]) | 1992-05-01 |
Family
ID=31833866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9526590U Pending JPH0452356U (en]) | 1990-09-10 | 1990-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452356U (en]) |
-
1990
- 1990-09-10 JP JP9526590U patent/JPH0452356U/ja active Pending
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